A new silicon micromachining method using SOI/SDB technology
- 30 April 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 23 (1-3) , 961-963
- https://doi.org/10.1016/0924-4247(90)87069-u
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Solid-state capacitive pressure transducersSensors and Actuators, 1986
- A high-performance silicon tactile imager based on a capacitive cellIEEE Transactions on Electron Devices, 1985
- Ellipsometric Study of the Etch‐Stop Mechanism in Heavily Doped SiliconJournal of the Electrochemical Society, 1985
- Fabrication of catheter-tip and sidewall miniature pressure sensorsIEEE Transactions on Electron Devices, 1982