Highest-power excimer lasers
- 1 June 1990
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 1225, 142-149
- https://doi.org/10.1117/12.18480
Abstract
A historical overview over the development of excimer lasers into the multi-100 Watt range is given. Special emphasis is on efforts in Japan and Europe concerning excimer lasers with an average power exceeding 1 kilowatt. The overview includes a discussion of the different excitation mechanisms.Keywords
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