High resolution x-ray diffraction characterization of semiconductor structures

• 15 September 1994
• journal article
• Published by Elsevier in Materials Science and Engineering: R: Reports
• Vol. 13  (1) , 1-56
• https://doi.org/10.1016/0927-796x(94)90008-6

Abstract

Keywords

• CRYSTAL
• RESOLUTION
• STRUCTURES
• SEMICONDUCTOR
• BASIC
• ROCKING
• QUANTUM WELL
• LAYER PARAMETERS
• KINEMATICAL DIFFRACTION PRINCIPLES