Wideband microwave switch by micromachining techniques
- 8 September 1998
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 3514, 229-236
- https://doi.org/10.1117/12.323894
Abstract
A micromachined microwave switch has been made on a semi- insulating GaAs substrate using a suspended membrane, gold coplanar waveguide (CPW), and electrostatic actuation as the switching mechanism. The electrostatic traction comes from the dc voltage applied between the ground of the CPW and the suspended membrane.Keywords
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