Chromium Carbide Thin Films Synthesized by Pulsed Nd:YAG Laser Deposition
- 1 June 1999
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 38 (6R)
- https://doi.org/10.1143/jjap.38.3619
Abstract
Chromium carbide thin films are synthesized on Si(100) substrates by a pulsed Nd:YAG laser deposition method at different substrate temperatures. Glancing-angle X-ray diffraction shows that a crystalline chromium carbide film can be prepared at the substrate temperature of 700°C. Grain size of the films, examined with a field-emission secondary electron microscope, increases with increasing substrate temperature.Keywords
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