Effect of BCl3 Dry Etching on InAlN Surface Properties
- 1 September 1996
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 143 (9) , L217-L219
- https://doi.org/10.1149/1.1837092
Abstract
Dry etched InAlN surfaces have been characterized by atomic force microscopy, current‐voltage measurements, and Auger electron spectroscopy. Electron cyclotron resonance discharges of , or all produce nitrogen deficient surfaces that promote leakage current in rectifying metal contacts, with the producing the least disruption of the InAlN surface properties.This publication has 0 references indexed in Scilit: