A silicon micromachined conductometric gas sensor with a maskless Pt sensing film deposited by selected-area CVD
- 31 October 1996
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 36 (1-3) , 312-319
- https://doi.org/10.1016/s0925-4005(97)80088-3
Abstract
No abstract availableKeywords
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- Chemical Vapor Deposition of Thin-Film PlatinumJournal of the Electrochemical Society, 1973
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