The Use of Metal-Organics in the Preparation of Semiconductor Materials

• 1 January 1971
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 118  (4) , 647-650
• https://doi.org/10.1149/1.2408131

Abstract

Keywords

• SEMICONDUCTOR MATERIALS
• EPITAXIAL GROWTH
• III-V SEMICONDUCTORS
• GALLIUM COMPOUNDS
• ARSENIC COMPOUNDS
• HETEROEPITAXY
• CHEMICAL VAPOR DEPOSITION
• INSULATING SUBSTRATES
• GALLIUM ALUMINUM ARSENIDE
• ALUMINUM ARSENIDE