High-rate evaporation/deposition processes of metals, alloys, and ceramics for vacuum metallurgical applications
- 1 July 1974
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 11 (4) , 814-819
- https://doi.org/10.1116/1.1312759
Abstract
This is a review on high-rate evaporation/deposition processes for metals, alloys, and ceramics. These processes are described. The influence of process variables on the microstructure and mechanical properties of the deposits is discussed. Present and potential applications are presented.Keywords
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