Reliability of a capacitance manometer in the range 2×10−4−5×10−6 Torr
- 1 February 1975
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 46 (2) , 140-143
- https://doi.org/10.1063/1.1134157
Abstract
A capacitance manometer has been tested and compared to the method of volumetric pressure division using helium as a working gas in the range 2×10−4−5×10−6 Torr. The results show that the unit tested was linear to the lowest pressures utilized, and the two methods were in agreement to about 0.6% plus 4×10−7 Torr, in addition to the errors introduced by the least count of the capacitance manometer’s digital readout. Argon and air gave similar results.Keywords
This publication has 5 references indexed in Scilit:
- Standards and Vacuum Measurement AccuracyJournal of Vacuum Science and Technology, 1972
- Reliable Submicron Pressure Readings with Capacitance ManometerReview of Scientific Instruments, 1966
- Avoiding Erroneous Submicron Pressure Readings: A Refrigerated McLeodJournal of Vacuum Science and Technology, 1964
- ON THE CALCULATION OF THERMAL TRANSPIRATIONThe Journal of Physical Chemistry, 1963
- Die Diffusion der Gase durch Quecksilberdampf bei niederen Drucken und die DiffusionsluftpumpeAnnalen der Physik, 1915