Ion Spectroscopy Gauge for XHV Pressure Measurements Down to 10-12 Pa without Errors Due to ESD Ions.
Open Access
- 1 January 1992
- journal article
- Published by The Vacuum Society of Japan in SHINKU
- Vol. 35 (4) , 422-430
- https://doi.org/10.3131/jvsj.35.422
Abstract
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