Electron beam exposure system for integrated circuits

• 1 May 1969
• journal article
• Published by Elsevier in Microelectronics Reliability
• Vol. 8  (2) , 101-IN12
• https://doi.org/10.1016/0026-2714(69)90206-6

Abstract

Keywords

• INTEGRATED CIRCUITS
• SYSTEM FOR INTEGRATED
• EXPOSURE SYSTEM
• ELECTRON BEAM EXPOSURE