Porous silicon-a new material for MEMS
- 23 December 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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- Processing of Three‐Dimensional Microstructures Using Macroporous n‐Type SiliconJournal of the Electrochemical Society, 1996
- The Physics of Macropore Formation in Low Doped n‐Type SiliconJournal of the Electrochemical Society, 1993
- Porous silicon formation: A quantum wire effectApplied Physics Letters, 1991
- Etch Channel Formation during Anodic Dissolution of N-Type Silicon in Aqueous Hydrofluoric AcidJournal of the Electrochemical Society, 1972