Surface geometries from channeling and blocking
- 1 April 1983
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 1 (2) , 1047-1054
- https://doi.org/10.1116/1.572340
Abstract
Medium energy ion beam crystallography, using the effects of channeling and blocking, is a technique sensitive to the geometries of solid surfaces. In this paper, we discuss principles, procedures, possibilities, and problems, illustrated by recent results on the Si (100)–(2×1) and –(1×1)2H and the Si (111)–(7×7) and laser-irradiated–(1×1) surfaces. The prominent role of Monte Carlo computer simulations in the preparation and interpretation of experiments is pointed out.Keywords
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