Rate equation for desorbing particles
- 1 January 1979
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 16 (1) , 54-57
- https://doi.org/10.1116/1.569867
Abstract
A rate equation describing the desorption of particles from substrates has been formulated using a simple classical model in terms of the particulate escape probabilities and escape velocities. Numerical results for desorption rates as a function of temperature using simple two-body potentials are calculated for various metallic systems. These results were obtained for the low coverage limits and are found to be in good agreement with experimental findings. The present formulation also provides an improved picture of the physical nature of the commonly discussed parameters, such as the frequency factor, desorption energy, and desorption temperature in relation to observed desorption phenomena.Keywords
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