Preparation and Properties of (Ba, Sr)TiO3 Thin Films by RF Magnetron Sputtering
- 1 September 1993
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 32 (9S)
- https://doi.org/10.1143/jjap.32.4115
Abstract
This paper describes the properties of (Ba0.5Sr0.5)TiO3 thin films prepared on Pd(100)/MgO(100) substrate using the rf magnetron sputtering technique. Perovskite-type thin films were prepared at a gas pressure of 7 mTorr, and the crystal orientations of thin films changed depending on the substrate temperature. The dielectric constant increased with increasing substrate temperature, and the maximum value ∼300 was obtained at 550°C.Keywords
This publication has 2 references indexed in Scilit:
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- Dielectric properties of the Ba1−xSrxTiO3 systemMaterials Letters, 1988