Preparation of boron-doped ZnO thin films by photo-atomic layer deposition
- 28 September 2000
- journal article
- Published by Elsevier in Solar Energy Materials and Solar Cells
- Vol. 65 (1-4) , 125-132
- https://doi.org/10.1016/s0927-0248(00)00086-6
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Highly Stable ZnO Thin Films by Atomic Layer DepositionJapanese Journal of Applied Physics, 1998
- Photo atomic layer deposition of transparent conductive ZnO filmsSolar Energy Materials and Solar Cells, 1997
- Growth of boron-doped ZnO thin films by atomic layer depositionSolar Energy Materials and Solar Cells, 1997