The effect of series resistance and junction capacitance on the high-frequency limit of IMPATT diode operation is studied with a Read-type small-signal theory, and is confirmed experimentally. Oscillation frequencies from 30 to 400 GHz have been measured with Si p + -n-n + abrupt junction diodes with a depletion layer width of 0.2 µm. The highest oscillation frequency increases as the junction diameter is decreased, owing to reduced junction capacitance and increased bias-current density. The highest oscillation frequency observed is 423 GHz, which is obtained in the fifth harmonic mode with a diode of 16-µm junction diameter. Fundamental oscillation frequency is found to depend strongly on dc bias-current density, and to be close to the avalanche frequency of the small-signal theory.