Evaluation of Pure Novolak Cresol‐Formaldehyde Resins for Deep U.V. Lithography
- 1 January 1982
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 129 (1) , 201-205
- https://doi.org/10.1149/1.2123757
Abstract
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