Two-dimensional multiwavelength surface emittinglaser arraysfabricated by nonplanar MOCVD

Abstract
The authors demonstrate two dimensional multiwavelength vertical cavity surface emitting laser (VCSEL) arrays fabricated by using nonplanar metal organic chemical vapour deposition (MOCVD). The resonance wavelength of GaInAs/GaAs VCSELs grown on a patterned substrate is successfully controlled in the wavelength range over 45 nm on wafer. The threshold of multiwavelength VCSELs formed on the patterned substrate is as low as 3 mA.