Two-dimensional multiwavelength surface emittinglaser arraysfabricated by nonplanar MOCVD
- 10 November 1994
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 30 (23) , 1947-1948
- https://doi.org/10.1049/el:19941305
Abstract
The authors demonstrate two dimensional multiwavelength vertical cavity surface emitting laser (VCSEL) arrays fabricated by using nonplanar metal organic chemical vapour deposition (MOCVD). The resonance wavelength of GaInAs/GaAs VCSELs grown on a patterned substrate is successfully controlled in the wavelength range over 45 nm on wafer. The threshold of multiwavelength VCSELs formed on the patterned substrate is as low as 3 mA.Keywords
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