Deposition of boron-nitride films by nitrogen sputtering from a boron-metal target

• 20 March 1995
• journal article
• Published by AIP Publishing in Applied Physics Letters
• Vol. 66  (12) , 1489-1491
• https://doi.org/10.1063/1.113664

Abstract

Keywords

• BORON NITRIDES
• FILM GROWTH
• SPUTTERING
• DEPOSITION
• HIGH−FREQUENCY DISCHARGES
• INFRARED SPECTRA