Distribution analysis of carbon and sulphur in CVD-Al2O3-layers by SIMS using Cs+ primary ions
- 1 August 1986
- journal article
- research article
- Published by Wiley in Surface and Interface Analysis
- Vol. 8 (4) , 159-165
- https://doi.org/10.1002/sia.740080404
Abstract
No abstract availableKeywords
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