SAW dispersion and film-thickness measurement by acoustic microscopy
- 1 August 1979
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 35 (3) , 215-217
- https://doi.org/10.1063/1.91099
Abstract
The reflection acoustic microscope has been used to measure SAW velocity dispersion and to indirectly measure the film thickness in a layered composite consisting of Au on a Si substrate. A quantitative thickness determination was made via the acoustic material signature technique, that is nondestructive and noncontacting. A theoretical prediction of SAW dispersion is in excellent agreement with these measurements.Keywords
This publication has 4 references indexed in Scilit:
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- Zinc-oxide thin-film surface-wave transducersProceedings of the IEEE, 1976
- Characteristics of Wedge Transducers for Acoustic Surface WavesIEEE Transactions on Sonics and Ultrasonics, 1975