Ion implantation during film growth and its effect on the superconducting properties of niobium
- 1 September 1975
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 46 (9) , 4006-4012
- https://doi.org/10.1063/1.322154
Abstract
Low‐energy (?500 eV) Kr+ ion bombardment during film growth and its consequences on superconducting properties of Nb are studied in a triode glow discharge sputtering configuration. Tc is depressed from the bulk value at a rate of −0.19 °C/at.% dissolved in the lattice. The residual resistivity shows an increase of 3.4 μΩ cm/at.% Kr. It is shown that radiation damage due to ion bombardment dominates the superconducting properties up to 0.2 at.% dissolved, whereas above this Kr concentration, up to ∼2 at.% Kr, the noble‐gas content dominates the transport properties. All films show a dilated lattice which is mainly caused by energetic bombardment during film growth rather than subsequent trapping of the Kr gas.This publication has 32 references indexed in Scilit:
- Theory for superconductivity in Pd-H and Pd-D systemsThe European Physical Journal A, 1973
- Point-contact tunneling deviceJournal of Applied Physics, 1973
- Variation of superconducting transition temperatures of transition-metal thin films deposited with the noble gasesJournal of Applied Physics, 1973
- Superconductivity in "Amorphous" Transition-Metal Alloy FilmsPhysical Review Letters, 1973
- Influence of Surface Absorption Characteristics on Reactively Sputtered Films Grown in the Biased and Unbiased ModesJournal of Applied Physics, 1972
- Electrical Characteristics of rf-Sputtered Single-Crystal Niobium FilmsJournal of Applied Physics, 1972
- Gas Analysis in Films by Laser-Induced Flash Evaporation Followed by Mass SpectrometryJournal of Applied Physics, 1972
- The superconducting transition temperatures of disordered Nb, W, and Mo filmsPhysics Letters A, 1969
- Superconductivity of Niobium FilmsJournal of the Physics Society Japan, 1969
- Gas Incorporation into Sputtered FilmsJournal of Applied Physics, 1967