Polarization effects in mask transmission

• 1 June 1992
• proceedings article
• Published by SPIE-Intl Soc Optical Eng
• p. 193-200
• https://doi.org/10.1117/12.130320

Abstract

Keywords

• POLARIZATION
• PHASE SHIFTER
• PHASE SHIFT MASK
• PHASE SHIFT
• BOUNDARY CONDITION