Identification of the volatile reaction products of the Cl2+GaAs etching reaction

• 1 July 1993
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 11  (4) , 1222-1242
• https://doi.org/10.1116/1.586924

Abstract

Keywords

• SURFACE ANALYSIS
• MATERIALS SCIENCE
• SURFACE TEMPERATURE
• SINGLE CRYSTAL
• MASS SPECTRA
• MASS SPECTROMETER
• MASS BALANCE
• MASS SPECTROMETRY
• ARSENIC
• GALLIUM ARSENIDE