Miniature silicon resonant pressure sensor
- 1 January 1988
- journal article
- Published by Institution of Engineering and Technology (IET) in IEE Proceedings D Control Theory and Applications
- Vol. 135 (5) , 369-372
- https://doi.org/10.1049/ip-d.1988.0056
Abstract
An absolute barometric pressure sensor which has shown exceptional performance is described in the paper. It consists of a mechanical resonator whose resonant frequency is changed by strain induced by applied pressure. The active element is formed in one piece, from single-crystal silicon, by microengineering techniques. It has a range from vacuum to a pressure of over 1 bar (105 Pa) and can resolve less than 1 part in 105 of full scale.Keywords
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