EPR Study of Carbon Vacancy-Related Defects in Electron-Irradiated 6H-SiC

• 17 January 2001
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 353-356, 517-520
• https://doi.org/10.4028/www.scientific.net/msf.353-356.517

Abstract

Keywords

• DEFECT
• ELECTRON IRRADIATION
• ELECTRON PARAMAGNETIC RESONANCE (EPR)
• SILICON CARBIDE (SIC)