Dry etching for coherent refractive microlens arrays

• 1 November 1994
• journal article
• Published by SPIE-Intl Soc Optical Eng in Optical Engineering
• Vol. 33  (11) , 3547-3551
• https://doi.org/10.1117/12.179880

Abstract

Keywords

• DRY ETCHING
• REFRACTIVE MICROLENS ARRAYS
• COHERENT REFRACTIVE