A simple calculation of the angular distribution of sputtered atoms
- 1 March 1975
- journal article
- research article
- Published by Springer Nature in Zeitschrift für Physik A Atoms and Nuclei
- Vol. 272 (1) , 127-130
- https://doi.org/10.1007/bf01408437
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- Resputtering effects by measurements of angular distributionsThe European Physical Journal A, 1973
- A note on the optical properties of sputtered gold filmsRadiation Effects, 1973
- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969
- II. The energy spectrum of ejected atoms during the high energy sputtering of goldPhilosophical Magazine, 1968
- Sputtering efficiency of amorphous substancesCanadian Journal of Physics, 1968
- Die ZerstÄubung von Kupfer durch Edelgas-Ionen im Energiebereich von 100 keV bis 1 MeV als Funktion des EinfallswinkelsThe European Physical Journal A, 1966