Fabrication and characterization of gated field emitter arrays with self-aligned carbon nanotubes grown by chemical vapor deposition
- 9 September 2002
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 81 (11) , 2070-2072
- https://doi.org/10.1063/1.1506408
Abstract
Field emitter arrays with multiwall carbon nanotubes(CNTs) grown inside their gated holes were fabricated on glass substrates. The Fe–Ni–Co alloy catalyst dots on which the CNTs would be grown were deposited into the gated holes by a self-aligned method to maintain a constant distance between CNT emitters and gate electrodes. The CNTs were synthesized by thermal chemical vapor deposition using a gas mixture of CO and H 2 at 500 ° C . The CNT lengths were controlled by changing ratios of CO to H 2 . Field emission currents and images were monitored as a function of gate and anode voltages. It was shown that the CNT emitters grown just up to the gate electrode height operated best in a triode mode.Keywords
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