First Observations of 0.1 μm Size Particles on Si Wafers Using Atomic Force Microscopy and Optical Scattering
- 1 December 1996
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 143 (12) , 4125-4128
- https://doi.org/10.1149/1.1837349
Abstract
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