Anodic Oxidation and Profile Determination of Ion Implanted Semi-Insulating GaAs
- 1 January 1975
- book chapter
- Published by Springer Nature
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Mg and Be Ion Implanted GaAsJournal of Applied Physics, 1972
- Ellipsometry of Anodic Oxide Films on GaAsJournal of the Electrochemical Society, 1971
- Electrical properties of Cd, Zn and S ion-implanted layers in GaAsRadiation Effects, 1970