Label-Free Biosensing With a Slot-Waveguide-Based Ring Resonator in Silicon on Insulator
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Open Access
- 4 September 2009
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Journal
- Vol. 1 (3) , 197-204
- https://doi.org/10.1109/jphot.2009.2031596
Abstract
We present a slot-waveguide-based ring resonator in silicon on insulator (SOI) with a footprint of only 13 mum times 10 mum, fabricated with optical lithography. Experiments show that it has 298 nm/RIU sensitivity and a detection limit of 4.2middot10-5 RIU for changes in the refractive index of the top cladding. We prove for the first time that surface chemistry for selective label-free sensing of proteins can be applied inside a 100 nm-wide slot region and demonstrate that the application of a slot waveguide instead of a normal waveguide increases the sensitivity of an SOI ring resonator with a factor 3.5 for the detection of proteins.Keywords
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