Design, fabrication and testing of microlens arrays for sensors and microsystems
- 1 November 1997
- journal article
- Published by IOP Publishing in Pure and Applied Optics: Journal of the European Optical Society Part A
- Vol. 6 (6) , 617-636
- https://doi.org/10.1088/0963-9659/6/6/004
Abstract
We report on our activities in design, fabrication, characterization and system integration of refractive microlens arrays for sensors and microsystems. Examples for chemical analysis systems (, blood gas sensor), neural networks and multiple pupil imaging systems for photolithography (microlens and smart mask lithography) are presented.Keywords
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