Gas-source molecular-beam epitaxy growth of InxGa1−x−yAlyP

• 1 March 1992
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 10  (2) , 969-971
• https://doi.org/10.1116/1.586103

Abstract