Method for examining solid specimens with improved resolution in the scanning electron microscope (SEM)
- 15 September 1973
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 23 (6) , 353-355
- https://doi.org/10.1063/1.1654916
Abstract
We have obtained a low‐loss image from a solid specimen in the high‐field region of the condenser‐objective lens in a high‐resolution SEM. These experiments have demonstrated an edge sharpness of 15 Å and a point‐to‐point resolution of better than 50 Å between gold dots on a latex ball on a solid substrate. In theory, it should be possible to obtain micrographs from solid specimens with a resolution of 10 Å by this method.Keywords
This publication has 4 references indexed in Scilit:
- High-resolution thermionic cathode scanning transmission electron microscopeApplied Physics Letters, 1973
- Low-Loss Image for Surface Scanning Electron MicroscopeApplied Physics Letters, 1971
- A scanning microscope with 5 Å resolutionJournal of Molecular Biology, 1970
- NEW CONTRAST MECHANISM FOR SCANNING ELECTRON MICROSCOPEApplied Physics Letters, 1970