Optical FM Heterodyne Interferometry For Range And Displacement Measurements
- 1 January 1988
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 133-134
- https://doi.org/10.1109/cpem.1988.671217
Abstract
A novel technique of frequency modulated ( FM ) heterodyne interferometer has been realized for measuring remotely the range and the displacement of both specular reflectors and diffuse surface objects using a FM semiconductor laser. The resolution better than 7 um was realized for the range measurement and about 1 nm for the displacement measurement with specular targets for ranges to about 2 m.Keywords
This publication has 2 references indexed in Scilit:
- Diode laser direct modulation heterodyne interferometerApplied Optics, 1987
- Optical range finder for 15–10-m distancesApplied Optics, 1983