Wet etching of thin SnO2 films
- 1 May 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 24 (1) , 61-63
- https://doi.org/10.1016/0924-4247(90)80049-b
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Fundamental characterization of clean and gas-dosed tin oxideSensors and Actuators, 1987
- Mechanism of semiconductor gas sensor operationSensors and Actuators, 1987
- Effect of CH4, SO2 and NO on the CO response of an SnO2-based thick film gas sensor in combustion gasesSensors and Actuators, 1985
- Plasma etching of SnO2 films on silicon substratesThin Solid Films, 1980
- Etching methods for indium oxide/tin oxide filmsThin Solid Films, 1976