Application of Tougaard background subtraction to Auger spectra. I: Silicon, SiO2 and Si3N4
- 1 December 1990
- journal article
- research article
- Published by Wiley in Surface and Interface Analysis
- Vol. 15 (12) , 767-774
- https://doi.org/10.1002/sia.740151209
Abstract
The inelastic background subtraction algorithm that was proposed by Tougaard for x‐ray photoelectron spectroscopy is applied to Auger electron spectra of Si, SiO2 and Si3N4. The influence of the different parameters, the cascade fitting and the use of calculated λ(E)K(E, T) functions or of the ‘Universal Cross‐section’ are examined in detail. It is shown that the method can be applied quite successfully for quantitative analysis when matrix corrections are considered.Keywords
This publication has 18 references indexed in Scilit:
- Damage and recovery by electron and ion beam irradiation during AES analysis of silicon oxynitridesSurface and Interface Analysis, 1990
- Auger electron spectroscopy from elemental standards. I: Theoretical calculationsSurface and Interface Analysis, 1988
- Quantitative analysis of the inelastic background in surface electron spectroscopySurface and Interface Analysis, 1988
- Low energy inelastic electron scattering properties of noble and transition metalsSolid State Communications, 1987
- The shape of the background in AES: Nonlinear features in log N(E) v. Log ESurface and Interface Analysis, 1986
- Quantitative Analysis by Auger Electron SpectroscopyJapanese Journal of Applied Physics, 1983
- Factors contributing to the Si L23V V, Si L1L23V and O K V V Auger lineshape in SiO2Journal of Vacuum Science and Technology, 1979
- Quantitative electron spectroscopy of surfaces: A standard data base for electron inelastic mean free paths in solidsSurface and Interface Analysis, 1979
- Linearized secondary-electron cascades from the surfaces of metals. I. Clean surfaces of homogeneous specimensPhysical Review B, 1977
- Theory ofAuger Energies Including Static RelaxationPhysical Review A, 1973