Scattering and radiation damage for light keV ions on solid surfaces

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Abstract
Using a Monte-Carlo numerical technique, scattering coefficients, energy spectra, project range distributions, and damage distributions have been calculated for H-Nb scattering over a reduced energy range 1 < ε0 < 10. A limited number of D and He scattering cases are also considered. The numerical calculations are compared to the Weissmann and Sigmund integro-differential equation solutions for range and damage. In general, the results are in quantitative agreement with the third order Edgeworth expansion solution. However, corrections due to the free surface effect are found to be important for both scattering and damage. The Monte-Carlo calculations are also used to interpret recent sputtering results for H, D, and He incident on Nb.