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  3. Kinetics of Si(100) nitridation first stages by ammonia: Electron- beam-induced thin film growth at room temperature
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  5. 10.1116/1.583027
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  3. Kinetics of Si(100) nitridation first stages by ammonia: Electron- beam-induced thin film growth at room temperature
  4. Cited-By
  5. 10.1116/1.583027

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