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  3. High resolution Auger sputter profiling study of the effect of phosphorus pileup on the Si–SiO2 interface morphology
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  5. 10.1116/1.569485
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  3. High resolution Auger sputter profiling study of the effect of phosphorus pileup on the Si–SiO2 interface morphology
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  5. 10.1116/1.569485

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