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  3. Surface chemistry of Al2O3 deposition using Al(CH3)3 and H2O in a binary reaction sequence
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  5. 10.1016/0039-6028(94)00578-8
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  3. Surface chemistry of Al2O3 deposition using Al(CH3)3 and H2O in a binary reaction sequence
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  5. 10.1016/0039-6028(94)00578-8

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