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  3. Properties of Al2 O 3 Films Deposited from the AlCl3, CO 2, and H 2 System
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  5. 10.1149/1.2131588
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  3. Properties of Al2 O 3 Films Deposited from the AlCl3, CO 2, and H 2 System
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  5. 10.1149/1.2131588

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