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  3. Deposition of TiN and Ti(O,C,N) hard coatings by a plasma assisted chemical vapor deposition process
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  5. 10.1116/1.573714
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  3. Deposition of TiN and Ti(O,C,N) hard coatings by a plasma assisted chemical vapor deposition process
  4. Cited-By
  5. 10.1116/1.573714

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