Scilit logo
  • Rankings
  • Search Publications
    Cited-By Search
  • Sources
  • Publishers
  • Scholars
    Top Cited Scholars
  • Organizations
  • About
Register

Filters

  1. Home
  2. Publications
  3. Studies on the mechanism of chemical sputtering of silicon by simultaneous exposure to Cl2 and low-energy Ar+ ions
  4. Cited-By
  5. 10.1116/1.582997
  1. Home
  2. Publications
  3. Studies on the mechanism of chemical sputtering of silicon by simultaneous exposure to Cl2 and low-energy Ar+ ions
  4. Cited-By
  5. 10.1116/1.582997

Cited-By Search

Scilit logo

Have questions? Email us at support@scilit.com

© 2025 Scilit is subsidized by MDPI.

MDPI initiatives

  • MDPI Journals
  • MDPI Books
  • Sciforum
  • Proceedings Series
  • Preprints.org
  • SciProfiles
  • Encyclopedia
  • JAMS

Legal

  • Privacy
  • Terms
  • About
  • Contact
  • Disclaimer

Follow us

  • facebook icon
  • x icon
  • linkedin icon

Join us

  • Career

© 2025 Scilit is subsidized by MDPI.