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  3. Reduction imaging at 14 nm using multilayer-coated optics: Printing of features smaller than 0.1 μm
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  5. 10.1116/1.585106
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  3. Reduction imaging at 14 nm using multilayer-coated optics: Printing of features smaller than 0.1 μm
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  5. 10.1116/1.585106

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