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  3. Production and Measurement of Dense Metal Ions for Physical Vapor Deposition by a Hollow Cathode Discharge
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  5. 10.7567/jjaps.2s1.415
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  3. Production and Measurement of Dense Metal Ions for Physical Vapor Deposition by a Hollow Cathode Discharge
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  5. 10.7567/jjaps.2s1.415

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