Fitting of rocking curves from ion-implanted semiconductors

• 1 February 1994
• journal article
• Published by International Union of Crystallography (IUCr) in Journal of Applied Crystallography
• Vol. 27  (1) , 103-110
• https://doi.org/10.1107/s0021889893007484

Abstract

Keywords

• ROCKING CURVES
• FITTING
• ION IMPLANTED SEMICONDUCTORS
• CURVES FROM ION